High Rate Deposition Technology and Rotatable Cathode Technology for Low Damage
نویسندگان
چکیده
منابع مشابه
Advances in Cold Cathode Physics and Technology
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ژورنال
عنوان ژورنال: Journal of The Surface Finishing Society of Japan
سال: 2013
ISSN: 0915-1869,1884-3409
DOI: 10.4139/sfj.64.374